Investigation of the processes of deposition of thin Teflon-like films by gas-jet method

M. N. Andreev; Alexey K. Rebrov; Alexey I. Safonov

Investigation of the processes of deposition of thin Teflon-like films by gas-jet method

M. N. Andreev

1. Novosibirsk State University Novosibirsk, Russian Federation

Alexey K. Rebrov

1. Novosibirsk State University Novosibirsk, Russian Federation

2. Institute of Thermophysics SB RAS Novosibirsk, Russian Federation

rebrov@itp.nsc.ru

Alexey I. Safonov

1. Institute of Thermophysics SB RAS Novosibirsk, Russian Federation

Timoshenko N.I.

The material was received by the Editorial Board: 09.10.2007

УДК 678; 539

Investigation of the processes of deposition of thin Teflon-like films by gas-jet method

References: Andreev M.N., Rebrov A.K., Safonov A.I., Timoshenko N.I. Investigation of the processes of deposition of thin Teflon-like films by gas-jet method. Vestnik NSU. Series: Physics. 2007, vol. 2, no. 4. P. 55–62 (in Russ.). DOI: 10.54238/1818-7994-2007-2-4-55-62