ATOMIC STEPS ON A SILICON SURFACE AS IS TEST-OBJECT IN ATOMIC FORCE MICROSCOPY
0000-0002-4016-593Х The material was received by the Editorial Board: 19.01.2009
To ensure uniformity of measurements in nanotechnology test-object have been developed. It provide precise calibration of z-coordinates of the atomic force microscope in the sub-and nanometer bands with an accuracy of 0.05 nm on the basis of a system of atomic steps, one interplanar distance in height, at the vicinal surface of silicon. Extremely high precision of the test-object is provided by comparing its values with the atomic lattice parameter of the perfect crystal. Keywords:
atomic-force microscopy, metrology, certification, atomic steps, surface.
УДК 53.083.98
PACs 06.20.fb, 68.37.Ps, 68.47.fg
ATOMIC STEPS ON A SILICON SURFACE AS IS TEST-OBJECT IN ATOMIC FORCE MICROSCOPY References: Nasimov D.A., Sheglov D.V., Latyshev A.V. ATOMIC STEPS ON A SILICON SURFACE AS IS TEST-OBJECT IN ATOMIC FORCE MICROSCOPY. Vestnik NSU. Series: Physics. 2009, vol. 4, no. 1. P. 47–55 (in Russ.). DOI: 10.54362/1818-7919-2009-4-1-47-55