6. Physics of a Fluid, Neutral and Ionized Gases

HIGH INTENSITY ARGON CLUSTER BEAMS FORMATION FOR TECHNOLOGICAL PROCESSES

Nikolay G. Korobeishchikov
1. Novosibirsk State University Novosibirsk, Russian Federation
korobei@ci.nsu.ru
Aleksandr E. Zarvin
1. Novosibirsk State University Novosibirsk, Russian Federation
zarvin@phys.nsu.ru
Valeriy V. Kaljada
1. Novosibirsk State University Novosibirsk, Russian Federation
v.kalyada@nsu.ru
The material was received by the Editorial Board: 23.03.2012
Modernization of experimental complex LEMPUS-1 was done. Experimental investigations of argon cluster beams formation for ion-cluster surface modification technology were performed. Intensity of cluster beams up to 5*1014 clusters per cm2 per sec with average cluster size about 1300 was obtained. It was found the optimal conditions for cluster beam formation.

Keywords:
supersonic jet, condensation, molecular beam, clusters, ionization.
УДК 533.6.011.8 + 533.599 + 544.277.4 + 544.277.6 + 536.423.4

HIGH INTENSITY ARGON CLUSTER BEAMS FORMATION FOR TECHNOLOGICAL PROCESSES
References: Korobeishchikov N. G., Zarvin A. E., Kalyada V. V., Khodakov M. D. HIGH INTENSITY ARGON CLUSTER BEAMS FORMATION FOR TECHNOLOGICAL PROCESSES. Vestnik NSU. Series: Physics. 2012, vol. 7, no. 2. P. 85–92 (in Russ.). DOI: 10.54362/1818-7919-2012-7-2-85-92