6. Solid-State and Semiconductor Physics, Physics of Nanostructures

ELECTROKINETIC LIQUID FLOW SENSOR

Maxim A. Parashchenko
1. Rzhanov Institute of Semiconductor Physics SB RAS Novosibirsk, Russian Federation
map@isp.nsc.ru
Nikolay S. Filippov
1. Rzhanov Institute of Semiconductor Physics SB RAS Novosibirsk, Russian Federation
2. Novosibirsk State University Novosibirsk, Russian Federation
filippov@isp.nsc.ru
Viktor V. Kirienko
1. Rzhanov Institute of Semiconductor Physics SB RAS Novosibirsk, Russian Federation
kirienko@isp.nsc.ru
The material was received by the Editorial Board: 10.04.2014
This paper deals with fabrication and characterization of liquid flow sensor based on electrokinetic effect – streaming potential. The possibility of using silicon microchannel membrane as a sensing element of the sensor has been demonstrated. Electric response of the sensor has been determined by passing deionized water through the membrane. A linear dependence of the operating characteristic has been found. Sensitivity and performance of the electrokinetic device have been evaluated. The optimal design of the liquid flow sensor has been proposed.

Keywords:
macroporous silicon, microchannel membrane, streaming potential, microfluidic system, liquid flow sensor. 
УДК 544.638.2

ELECTROKINETIC LIQUID FLOW SENSOR
References: Parashchenko M. A., Filippov N. S., Kirienko V. V., Romanov S. I. ELECTROKINETIC LIQUID FLOW SENSOR. Vestnik NSU. Series: Physics. 2014, vol. 9, no. 4. P. 89–96 (in Russ.). DOI: 10.54362/1818-7919-2014-9-4-89-96