The Modification of Optical Properties of the Surfaces by the Glancing Angle Deposition Technique

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The paper considers the optical properties and structure of thin films of titanium dioxide formed by the glancing angle deposition method. It was show that this method allows the formation of coatings having a significantly lower refractive index than that of the initial material. Thus, the experimentally obtained value of the refractive index of thin films of titanium dioxide was ~ 1.2, which is almost two times less than that of a polycrystalline material. This allows you to use this method to produce the coatings with a variable refractive index using only one material, changing the geometry of the deposition process only.

Keywords
glancing angle deposition, titanium dioxide, optical properties, ellipsometry
Acknowledgements
The reported study was funded by RFBR and Novosibirsk region according to the research project 19-42-540009 r_a. The work was done at the shared research center SSTRC on the basis of the VEPP-4 – VEPP-2000 Complex at BINP SB RAS, using equipment supported by project RFMEFI62119X0022. The SEM and ellipsometry studies were performed on the equipment of CKP “VTAN” in the ATRC department of NSU
УДК 535.5, 535.016

The Modification of Optical Properties of the Surfacesby the Glancing Angle Deposition Technique