6. DETECTION OF TERAHERTZ RADIATION

DESIGN AND APPLICATION OF UNCOOLED MICROBOLOMETER ARRAY FOR THE TERAHERTZ SPECTRAL RANGE

Mikhail A. Dem’yanenko
1. Rzhanov Institute of Semiconductor Physics SB RAS Novosibirsk, Russian Federation
dem_yanenko@thermo.isp.nsc.ru
Dmitriy G. Esaev
1. Rzhanov Institute of Semiconductor Physics SB RAS Novosibirsk, Russian Federation
Viktor N. Ovsyuk
1. Rzhanov Institute of Semiconductor Physics SB RAS Novosibirsk, Russian Federation
The material was received by the Editorial Board: 25.09.2010
This article presents the results of some experiments on the further improvement in the sensitivity of uncooled microbolometers in the terahertz range via depositing an additional thin metallic absorbing layer on a microbolometer membrane. The experiments have shown the mentioned modification of the microbolometer design increase its sensitivity several times. A strong dependence of the microbolometer sensitivity on the angle of polarization of terahertz radiation has been revealed. It has been shown that the microbolometer responsivity in the terahertz range is caused by the absorption of radiation in the narrow metallic bus going along the microbolometer legs as well as in the strips acting as an ohmic contact with the thermally sensitive layer.

Keywords:
uncooled microbolometer, vanadium oxide, terahertz range, polarization, sensitivity, micro-antenna, free electron laser. 
УДК 535.231.62: 535-14: 535-45

DESIGN AND APPLICATION OF UNCOOLED MICROBOLOMETER ARRAY FOR THE TERAHERTZ SPECTRAL RANGE
References: Dem’yanenko M. A., Esaev D. G., Ovsyuk V. N., Fomin B. I., Marchishin I. V., Aliev V. Sh., Knyazev B. A., Gerasimov V. V., Kulipanov G. N., Vinokurov N. A., Litvitsev V. I. DESIGN AND APPLICATION OF UNCOOLED MICROBOLOMETER ARRAY FOR THE TERAHERTZ SPECTRAL RANGE. Vestnik NSU. Series: Physics. 2010, vol. 5, no. 4. P. 73–78 (in Russ.). DOI: 10.54362/1818-7919-2010-5-4-73-78