6. Quantum Optics, Quantum Electronics

ELABORATION OF MICROSTRUCTURED SUBTERAHERTZ FILTERS VIA LIGA TECHNOLOGY AND INVESTIGATION OF THEIR SELECTIVE PROPERTIES

Sergei A. Kuznetsov
Scopus Author ID: 56426776500
Researcher ID: A-6723-2014
1. Novosibirsk State University Novosibirsk, Russian Federation
2. Rzhanov Institute of Semiconductor Physics of the Siberian Branch of the Russian Academy of Sciences, Novosibirsk Branch TDIAM
serge_smith@ngs.ru
Aleksandr N. Gentselev
1. Budker Institute of Nuclear Physics SB RAS Novosibirsk, Russian Federation
Boris G. Goldenberg
1. Budker Institute of Nuclear Physics SB RAS Novosibirsk, Russian Federation
The material was received by the Editorial Board: 24.09.2012
We discuss the peculiar features of the LIGA-technology methods elaborated in the Siberian Synchrotron and Terahertz Radiation Centre (SSTRC, BINP SB RAS) and applied for producing quasi-optical subterahertz filters based on self-bearing microstructures of the metallic and pseudo-metallic types. The results of manufacturing the low- and highaspect inductive microstructures with topology of dipole slots utilized as the selective elements in the band-pass filters for the frequency range 0,25–0,45 THz are presented. The details of spectral characterization of the developed filters using a BWO-spectroscopy technique are considered. A good agreement between the results of measurements and numerical simulations is demonstrated.

Keywords:
LIGA-technology, microstructures, quasi-optical filters, frequency selective surfaces, subterahertz radiation, BWO-spectroscopy.
УДК 539.1.044, 537.86.029.65/.79

ELABORATION OF MICROSTRUCTURED SUBTERAHERTZ FILTERS VIA LIGA TECHNOLOGY AND INVESTIGATION OF THEIR SELECTIVE PROPERTIES
References: Kuznetsov S. A., Gentselev A. N., Goldenberg B. G., Kondratyev V. I., Arzhannikov A. V., Thumm М. К. А., Zelinsky A. G. ELABORATION OF MICROSTRUCTURED SUBTERAHERTZ FILTERS VIA LIGA TECHNOLOGY AND INVESTIGATION OF THEIR SELECTIVE PROPERTIES. Vestnik NSU. Series: Physics. 2012, vol. 7, no. 4. P. 25–42 (in Russ.). DOI: 10.54362/1818-7919-2012-7-4-25-42